Vacuum Station (Cryogenic)
Vacuum Test Station
In order to minimize the influence of the impurities contained in the air, measuring the performance of the chip is taken under vacuum to provide air clean environment.
It is possible to test at low to high temperature
• Option : Gases such as Nitrogen (N2) are infused
• Application : wafer, chip, pcb, board
• Chuck : travel range 50 mm x 50 mm
(option, variable)
• Cryogenic : LN2, Lhe / 100K or 5K
• Measurement : RF & DC
DVT50
• 50 mm Chuck [Economy]
• Microscope : 10~360 x, Zoom Control
• Noise Level : below 10pA
• Vacuum : 5 x 10-3 torr
• Fixed chuck, Positioner range : 30 mm x 10 mm
• Micropositioner 4 ea + 17" monitor + zoom Scope + Pump
• Option : High Temp. & Low Temp.
DVT100
• 100 mm Chuck [Standard]
• Microscope : 10~360 x, Zoom Control
• Noise Level : below 10pA
• Vacuum : 3 x 10-2 torr
• Chuck: X, Y axis Travel range : ±75 mm
• Positioner range: 20 mm(X), 6 mm(Y), 6 mm(Z)
• Micropositioner 4 ea + 17" monitor + zoom Scope + Pump
• Option: High Temp. & Low Temp.
DVT200
• 200 mm Chuck [Professional]
• Microscope : 10~360 x, Zoom Control
• Noise Level : below 10pA
• Vacuum : 5 x 10-5 torr
• X, Y, Z range : 20 mm x 20 mm x 15 mm
• Micropositioner 4 ea + 17" monitor + zoom Scope + Pump (Rotary, Turbo)
• Option : High Temp. & Low Temp.
Ar, LN2, N2, O2, Etc.
