DBT200W (~110GHz Test System)

Item 

Specifications

Item 

Specifications

• CCD Camera

• High Resolution Camera (HD, Digital)

• Monitor included (Check the sample)

• Observable through monitor

• Option : Camera resolution 

• Microscope 

• 15~380x, zoom control (20" monitor)

• Zoom : 0.75x ~ 5x

• Option : Zoom scope resolution

• Scope X,Y Stage

• X,Y axis travel range: ±25 mm

(One whole turn moves 8 mm)

• Z(Focus): ±15 mm 

• Illuminator 

• For scope

• Spot & ring light

• Light attached to the scope in order to observe the sample

• Dimension 

• Weight: 155 kg

• Size(mm): 1000(w) x 900(d) x 1500(h)

• Chuck  

• Size : 8"(200 mm) / wafer chuck - circle

• Clamp: Vacuum (5 mm~200 mm)

• Material: Al(NI)

• Tilt(Theta angle): 7°

• Option : Package chuck

• Chuck X,Y Stage 

• X, Y axis travel range: ±100 mm

• Resolution : ±3 μm

• Z travel range: 10 mm

• Vacuum Switch  

• For holding sample in place

- Chuck vacuum on/off

•  mmW Positioner  
  

• 110GHz Test head mounted

• 45, 0 degree mount module

• X, Y, Z travel range : 80 x 80 x 10(mm)