DBT200A (Motorized RF Test System)

Item 

Specifications

Item 

Specifications

• CCD Camera

• High Resolution Camera (HD, Digital)

• Monitor included (Check the sample)

• Observable through monitor

• Option : Camera resolution 

• Microscope 

• 15~380x, zoom control (20" monitor)

• Zoom : 0.75x ~ 5x

• Option : Zoom scope resolution

• Scope X,Y Stage

• X,Y axis travel range:  ±25 mm

(One whole turn moves 8 mm)

• Z(Focus): ±15 mm 

• Illuminator 

• For scope

• Spot & ring light

• Light attached to the scope in order to observe the sample

• Dimension 

• Weight: 255 kg

• Size(mm): 1000(w) x 900(d) x 1500(h)

• Chuck  

• Size: 8"(200 mm) / wafer chuck - circle

• Clamp: Vacuum  (5 mm~200 mm)

• Material: Al(NI)

• Tilt (Theta angle): 7°

• Option: Package chuck

• Chuck X,Y Motorized Stage 

• X, Y axis travel range: ±50 mm

• Resolution: ±3 μm

• Joystick manual control

• Vacuum Switch  

• For holding sample in place

- Chuck vacuum on/off

•  Z-Lever (Motorized) 
  

• Platen Z: 5 mm rough adjust, knob up/down

• 5 mm fine adjustable

• Resolution : 5 μm±1 μm