PR100E

Item 

Specification 

Item 

Specification  

• Microscope 

• Zoom scope

• Zoom : 0.75x ~ 3x 

(Option: 5X)

• Illuminator : Ring type

• CCD : HDMI(1024x768)

• Chuck

• Size: 100 mm x 100 mm

- package chuck (Square)

Clamp: Vacuum (option)

Material: Polyacetal

Option: Wafer chuck, Al(NI)

• Scope Stage & Arm 

• Scope Stage

- X,Y,Z axis travel range:

±15 mm

• Scope Arm

- Rotate & up/down

• Chuck Stage

• X, Y axis travel range:

10 mm (fine)

• Z axis travel range

(Option: 6 mm(fine))

• Magnet base on/off (For regular movements)

• Dimension 

• Weight: 28 kg

• Size(mm): 

480(w) x 490(d) x 500(h)

• Vacuum Switch

• For holding the sample in place (option)

- Chuck vacuum on/off

• Option

• Microscope Type

- Stereo scope or Zoom Scope

(No changes in Scope stage and Arm)

※ Zoom Scope Type: Observable through monitor

- Camera connected