PR100E

 Eco version, TDR



Item 

Specification 

Item 

Specification  

  • Microscope 

• Zoom scope

• Zoom : 0.75x ~ 5x 

(Option: 2.5X)

• Illuminator : Ring type

• CCD : HDMI(1024x768)

• F.O.V. : approx. 1.3mm ~ 8.5mm

  • Chuck

• Size: 100 mm x 100 mm

- package chuck (Square)

Clamp: vacuum (option)

Material: Polyacetal

Option: Wafer chuck, Al(NI)

  • Scope Stage & Arm 

• Scope Stage

- X,Y,Z axis travel range:

±15 mm

• Scope Arm

- Rotate & up/down

  • Chuck Stage 

• X, Y axis travel range : 10mm (fine)

• Magnet base on/off  (For regular movements)

• Option :

- Z axis travel range

(Option : 6 mm(fine)

  • Dimension 

• Weight: Approx. 28 kg

• Size(mm): 

480(w) x 490(d) x 500(h)

  • Vacuum Switch  

• For holding the sample in place (option)

- Chuck vacuum on/off 
  • Option 

• Microscope Type

- Stereo scope or Zoom Scope

- Scope stage:

-Fixed type

-Flexible type

※  Zoom Scope Type: Observable through monitor

- Camera connected

• Basic Model, Modifications may be made