mmW Station - Manual, 150mm
Item
Specifications
Item
Specifications
- CCD Camera
• High Resolution Camera (HD, Digital)
• Monitor included (Check the sample)
• Observable through monitor
• Option : Camera resolution
- Microscope
• 15~380x, zoom control (20" monitor)
• Zoom : 0.75x ~ 7x
• Option : Zoom scope resolution
- Scope X,Y Stage
• X, Y axis travel range: ±5 mm (fine)
• coarse travel range: 150 mm
• Z(Focus): ±15 mm
- Illuminator
• For scope
• Spot & ring light
• Light attached to the scope in order to observe the sample
- Dimension
• Weight: Approx. 65 kg
• Table included: Approx. 265 kg
• Size(mm): 900(w) x 900(d) x 800(h)
- Chuck
• Size: 6"(150 mm)/wafer chuck - circle
• Clamp: Vacuum (10 mm~150 mm)
• Material: Al(NI)
• Tilt(Theta angle): 7°
• option : package chuck
- Chuck X,Y Stage
• X, Y axis travel range: ±75 mm
• Resolution: ±3 μm
• Y coarse rail travel range: 200 mm
- Vacuum Switch
• For holding sample in place
- Chuck vacuum on/off
- mmW Positioner
• X, Y, Z travel range : 10 mm x 10 mm x 10 mm
• Resolution: 1 μm
• Compatible Inst.: Keysight, Anritsu, Rohde
- Z-Lever
• Platen Z: 5 mm rough adjust, knob up/down
• 5 mm fine adjustable
• 40 mm coarse adjustable
• Resolution : 5 μm±1 μm
• Basic Model, Modifications may be made